Susan K. Jones, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH
Date
[1996]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2725
Damon K. DeBusk, Sergio Ajuria, chairs/editors ; sponsored ... by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] The Electrochemical Society
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3215
David E. Seeger, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International, SEMATECH
Date
[1996]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2723
John M. Warlaumont, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Date
[1995]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2437
Seppo Honkanen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering; cooperating organization, DARPA--Defense Advanced Research Projects Agency
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2996
Yangyuan Wang, Jun-en Yao, Christopher J. Progler, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, COS--Chinese Optical Society ; cooperating organizations, Australian Optical Society ... [and others] ; supporting organizations, National Natural Science Foundation of China ... [and others]
Date
[2005]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5645
José Fco. López ... [and others], chairs/editors ; sponsored by SPIE Europe ; cosponsored by AnaFocus (Spain) ... [and others] ; cooperating organizations, CNM--Centro Nacional de Microelectrónica (Spain) ... [and others] ; published by SPIE--the International Society for Optical Engineering
Date
[2005]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5837
Richard M. Silver, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH
Date
[2005]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5752
Hiroyoshi Tanabe, editor ; sponsored by PMJ--Photomask Japan, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology, [and] SPIE--The International Society for Optical Engineering ; cooperating organizations, The Institute of Electrical Engineers of Japan ... (et al.); co-organized by Yokohama City (Japan); published by SPIE--The International Society for Optical Engineering
Date
[2004]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5446
Lars W. Liebmann, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH
Date
[2005]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5756
Soon-Fatt Yoon, Raymond Yu, Chris A. Mack, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SPIE Singapore Chapter, Institute of Physics Singapore ; cosponsored by SPIE Japan Chapter ... [and others] ; cooperating organizations Nanyang Technological University (Singapore) ... [and others] ; published by SPIE--the International Society for Optical Engineering
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3183
Abe Ghanbari, Anthony J. Toprac, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] the Electrochemical Society
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3213
Sergio Ajuria, Tim Z. Hossain, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, Solid State Technology, the Electrochemical Society, American Vacuum Society
Date
[1998]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3509
Hiroichi Kawahira, editor ; sponsored by PMJ--Photomask Japan, BACUS, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for the symposium, Japan Society of Applied Physics ... [and others] ; cooperating organization for technical exhibit, SEMI Japan ; supported by Yokohama City ; published by SPIE--the International Society for Optical Engineering
Date
[2001]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4754
Bhanwar Singh, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International
Date
[1999]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3677
Lars W. Liebmann, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH
Date
[2004]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5379
Anthony J. Toprac, Kim Dang, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, the Electrochemical Society ... [and others]
Date
[1999]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3882
Sharad Prasad, Hans-Dieter Hartmann, Tohru Tsujide, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Solid State Technology ... [and others]
Date
[1998]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3510
Michael T. Postek, Craig Friedrich, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology
Date
[1996]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2880
Armando Iturralde, Te-Hua Lin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [and others]
Date
[1996]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2876
Chris A. Mack, Tom Stevenson, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations EOS--European Optical Society, IEE--the Institution of Electrical Engineers (UK)
Date
[2001]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4404