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Process, equipment, and materials control in integrated circuit manufacturing II : 16-17 October 1996, Austin, Texas
- Available as
- Physical
Details
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- Creator
- Armando Iturralde, Te-Hua Lin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [and others]
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Bellingham, Wash., USA : SPIE, [1996]
- ©1996
- Physical Details
-
- vii, 258 pages : illustrations ; 28 cm
- ISBNs
- 9780819422743, 0819422746
- OCLC
- ocm35664549
- Includes bibliographic references and author index.