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In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing II : 23-24 September, 1998, Santa Clara, California
- Available as
- Physical
Details
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- Creator
- Sergio Ajuria, Tim Z. Hossain, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organizations, Solid State Technology, the Electrochemical Society, American Vacuum Society
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, [1998]
- Physical Details
-
- ix, 244 pages : illustrations ; 28 cm
- ISBNs
- 0819429686, 9780819429681
- OCLC
- ocm39869199
- Includes bibliographical references and author index.
- Plenary papers -- Electrical/field emission techniques -- Optical and EM-wave techniques -- Surface photovoltage techniques -- Computational techniques -- Novel techniques and applications