Website Search
Find information on spaces, staff, and services.
Catalog Search
Books
In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing : 1-2 October 1997, Austin, Texas
- Available as
- Physical
Details
Checking for availability...
- Creator
- Damon K. DeBusk, Sergio Ajuria, chairs/editors ; sponsored ... by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] The Electrochemical Society
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Bellingham, Wash., USA : SPIE, [1997]
- ©1997
- Physical Details
-
- v, 186 pages : illustrations ; 28 cm
- ISBNs
- 9780819426475, 0819426474
- OCLC
- ocm37744642
- Includes bibliographical references and index.