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Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas
- Available as
- Physical
Details
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- Creator
- Fusen E. Chen, Shyam P. Murarka, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
- Format
- Books
- Language
- English
- Publication
-
- Bellingham, Wash., USA : SPIE, [1994]
- ©1994
- Physical Details
-
- ix, 290 pages : illustrations ; 28 cm
- ISBNs
- 9780819416681, 0819416681
- OCLC
- ocm31210232
- Includes bibliographical references and author index.