M. Edward Motamedi, Rolf Göring, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [and others]
Date
[2001]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4561
M. Edward Motamedi, Rolf Göering, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] Sandia National Laboratories (USA)
Date
[2000]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4178