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MOEMS and miniaturized systems II : 22-24 October, 2001, San Francisco, [California] USA
- Available as
- Physical
Details
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- Creator
- M. Edward Motamedi, Rolf Göring, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [and others]
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Bellingham, Washington : SPIE, [2001]
- ©2001
- Physical Details
-
- xxv, 350 pages : illustrations ; 28 cm
- ISBNs
- 9780819442895, 0819442895
- OCLC
- ocm48519272
- Includes bibliographic references and author index.