David E. Seeger, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3048
Damon K. DeBusk, Sergio Ajuria, chairs/editors ; sponsored ... by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] The Electrochemical Society
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3215
David E. Seeger, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International, SEMATECH
Date
[1996]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2723
James H. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [and others]
Date
[1998]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3511
John M. Warlaumont, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Date
[1995]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2437
James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA)
Date
[2003]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4983
David O. Patterson, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Date
[1994]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2194
Rajeshuni Ramesham, Danelle M. Tanner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
Date
[2003]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4980
Danelle M. Tanner, Rajeshuni Ramesham, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology [and] Sandia National Laboratories (USA)
Date
[2005]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5716
Eric G. Johnson, Gregory P. Nordin, Thomas J. Suleski, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, Sandia National Laboratories (USA)
Date
[2005]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5720