John M. Warlaumont, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Date
[1995]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2437
David O. Patterson, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Date
[1994]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2194
James H. Smith, Peter A. Krulevitch, Hubert K. Lakner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Scandia National Laboratories (USA)
Date
[2003]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4983
Ayman El-Fatatry, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology [and] Sandia National Laboratories (USA)
Date
[2005]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5719
Jean Michel Karam, John Yasaitis, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Semiconductor Equipment and Materials International (USA) ... [and others]
Date
[2001]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4557
David E. Seeger, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3048
David E. Seeger, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International, SEMATECH
Date
[1996]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2723
Damon K. DeBusk, Sergio Ajuria, chairs/editors ; sponsored ... by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] The Electrochemical Society
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3215
James H. Smith, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [and others]
Date
[1998]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3511
Sing H. Lee, Eric G. Johnson, chairs/editors ; sponsored by SPIE-the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
Date
[2000]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4179