Susan K. Jones, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH
Date
[1996]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2725
organised by the Commission of the European Communities, Health and Safety Directorate, and the Community Bureau of Reference, in collaboration with the Royal Society of Chemistry, Analytical Division, Automatic Methods Group (UK), and in cooperation with Arbejdsmiljøinstituttet (København, DK) ... [and others] ; edited by R.H. Brown ... [and others]
Date
[1992]
Series
Special publication (Royal Society of Chemistry (Great Britain)) ; no. 108