Damon K. DeBusk, Sergio Ajuria, chairs/editors ; sponsored ... by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] The Electrochemical Society
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3215
Seppo Honkanen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering; cooperating organization, DARPA--Defense Advanced Research Projects Agency
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2996
Lars W. Liebmann, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH
Date
[2004]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5379