Elizabeth A. Dobisz, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH
Date
[2001]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4343
R. Scott Mackay, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH
Date
[2005]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5751
Roxann L. Engelstad, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH
Date
[2002]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4688
ShuShen Deng ... [and others], chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering [and] COS--Chinese Optical Society ; cooperating organizations, Shanghai Jiaotong University (China) ... [and others] ; supported by National Natural Science Foundation of China ... [and others]
Date
[2002]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4915
Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Date
[1994]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2197