Susan K. Jones, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH
Date
[1996]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2725
Bhanwar Singh, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International
Date
[1999]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3677
Marylyn H. Bennett, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Date
[1995]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2439
Knut H. Stamnes, chair/editor ; sponsored by European Optical Society (EOS), SPIE--the International Society for Optical Engineering in cooperation with Norwegian Research Council ... [and others]
Date
[1993]
Series
Europto series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2049
Michael C. Roggemann, Luc R. Bissonnette, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organization, the Remote Sensing Society
Date
[1999]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3763
Neal T. Sullivan, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ; International SEMATECH
Date
[2000]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3998
Daniel J.C. Herr, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ; International SEMATECH
Date
[2002]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4689