M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored by SPIE--the International Society for OPtical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organization Soild State Technology ; published by SPIE--the International Society for Optical Engineering
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3226
Patrick J. French, Kevin Chau, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperaing organizations , SEMI--Semiconductor Equipment and Materials International ... [and others]
Date
[1998]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3514
Craig R. Friedrich, Yuli Valdimirsky, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperaing organizations , SEMI--Semiconductor Equipment and Materials International ... [and others]
Date
[1998]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3512
Jean-Michel Karam, John Yasaitis, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
Date
[2000]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4174