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Micromachined devices and components IV : 21-22 September, 1998, Santa Clara, California
- Available as
- Physical
Details
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- Creator
- Patrick J. French, Kevin Chau, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperaing organizations , SEMI--Semiconductor Equipment and Materials International ... [and others]
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Bellingham, Washington : SPIE, [1998]
- ©1998
- Physical Details
-
- viii, 402 pages : illustrations ; 28 cm
- ISBNs
- 9780819429735, 0819429732
- OCLC
- ocm39930140
- Includes bibliographical references and author index.