Rajeshuni Ramesham, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) ... [and others]
Date
[2001]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4558
Norbert Meyendorf, George Y. Baaklini, Bernd Michel, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Date
[2004]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5392
Shih-Chi Liu, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by, ASME--American Society of Mechanical Engineers ... [and others] ; cooperating organizations, Air Force Office of Scientific Research (USA) ... [and others]
Date
[2003]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5057