Ih-chin Chen ... [and others], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [and others]
Date
[1996]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2875
M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored by SPIE--the International Society for OPtical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organization Soild State Technology ; published by SPIE--the International Society for Optical Engineering
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3226
M. Edward Motamedi, Wayne Bailey, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organizations, Solid State Technology, Sandia National Laboratories ; published by SPIE--the International Society for Optical Engineering
Date
[1996]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2881
Wayne Bailey ... [and others], chairs/editors ; sponsored by SEMI-Semiconductor Equipment and Materials International ... [and others], published by SPIE--the International Society for Optical Engineering
Date
[1995]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2641
Mark Rodder ... [and others], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] The Electrochemical Society
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3212
Ali Keshavarzi, Sharad Prasad, Hans-Dieter Hartmann, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, the Electrochemical Society
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3216
Ali Keshavarzi, Sharad Prasad, Hans-Dieter Hartmann, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International
Date
[1996]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2874
M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International ... [and others]
Date
[1998]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3513