Hiroichi Kawahira, editor ; sponsored by PMJ--Photomask Japan, BACUS, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for the symposium, Japan Society of Applied Physics ... [and others] ; cooperating organization for technical exhibit, SEMI Japan ; supported by Yokohama City ; published by SPIE--the International Society for Optical Engineering
Date
[2001]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4754
Hiroichi Kawahira, editor ; sponsored by PMJ--Photomask Japan, BACUS, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for the symposium, Japan Society of Applied Physics ... [and others] ; cooperating organization for technical exhibit, SEMI Japan ; supported by Yokohama City
Date
[2001]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4409