Hannfried Zügge, chair/editor ; sponsored by European Optical Society (EOS), SPIE--the International Society for Optical Engineering ; in cooperation with Technische Universität Berlin
Date
[1993]
Series
Europto series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 1780
Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Date
[1995]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2440