sponsored by the Thermodynamics and Phase Equilibria Committee of ASM International in conjunction with the Materials Design and Manufacturing Division (MDMD) of the Minerals, Metals & Materials Society, held during Materials Week '94 in Rosemont, Illinois, USA, October 2-6, 1994 ; edited by Philip Nash, Bo Sundman
Proceedings / SPIE--the International Society for Optical Engineering In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing II