David E. Seeger, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3048
Wolfgang Osten, Christophe Gorecki, Erik Novak, chairs/editors ; sponsored by, SPIE Europe ; cooperating organizations, European Optical Society ; published by SPIE--the International Society for Optical Engineering
Date
[2005]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5856
Roxann L. Engelstad, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH
Date
[2003]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5037
Morley M. Blouke, Nitin Sampat, Ricardo J. Motta, chairs/editors ; sponsored and published by IS&T--the Society for Imaging Science and Technology [and] SPIE--the International Society for Optical Engineering
Date
[2003]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5017
Tuan Vo-Dinh, Günter Gauglitz, Robert A. Lieberman, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Date
[2004]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5586