sponsored by National Bureau of Standards ... [and others] ; October 15-17, 1984, NBS, Boulder, Colorado 80303 ; edited by Harold E. Bennett ... [and others]
U.S. Department of Commerce, National Bureau of Standards, National Engineering Laboratory, Center for Electronics and Electrical Engineering, Semiconductor Devices and Circuits Division, and Semiconductor Materials and Processes Division ; prepared for National Bureau of Standards ... [and others]