Hiroyoshi Tanabe, editor ; sponsored by PMJ--Photomask Japan, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology, [and] SPIE--The International Society for Optical Engineering ; cooperating organizations, The Institute of Electrical Engineers of Japan ... (et al.); co-organized by Yokohama City (Japan); published by SPIE--The International Society for Optical Engineering
Date
[2004]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5446
Elizabeth A. Dobisz, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH
Date
[2000]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3997
R. Scott Mackay, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, [and] International SEMATECH
Date
[2004]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5374
Soon-Fatt Yoon, Raymond Yu, Chris A. Mack, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, SPIE Singapore Chapter, Institute of Physics Singapore ; cosponsored by SPIE Japan Chapter ... [and others] ; cooperating organizations Nanyang Technological University (Singapore) ... [and others] ; published by SPIE--the International Society for Optical Engineering
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3183