Hiroyoshi Tanabe, editor ; sponsored by PMJ--Photomask Japan, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology, [and] SPIE--The International Society for Optical Engineering ; cooperating organizations, The Institute of Electrical Engineers of Japan ... (et al.); co-organized by Yokohama City (Japan); published by SPIE--The International Society for Optical Engineering
Date
[2004]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5446
Hiroichi Kawahira, editor ; sponsored by PMJ--Photomask Japan, BACUS, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for the symposium, Japan Society of Applied Physics ... [and others] ; cooperating organization for technical exhibit, SEMI Japan ; supported by Yokohama City ; published by SPIE--the International Society for Optical Engineering
Date
[2001]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4754
Chris A. Mack, Xiaocong Yuan, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) ... [and others]
Date
[2000]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4226
Hiroyoshi Tanabe, editor ; sponsored by PMJ--Photomask Japan, BACUS--the international technical roup of SPIE dedicated to the advancement of photomask technology, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for symposium, the Japan Society of Applied Physics ... [and others] ; cooperating organization for technical exhibit, SEMI Japan ; supported by Yokohama City ; published by SPIE--the International Society for Optical Engineering
Date
[2003]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5130
Hiroaki Morimoto, editor ; sponsored by Photomask Japan, BACUS, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for the symposium, Japan Society of Applied Physics, Japan Society for Precision Engineering, [and] Institute of Electrical Engineers of Japan ; cooperating organization for technical exhibit, SEMI Japan
Date
[2000]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4066
Masanori Komuro, editor ; sponsored by PMJ--Photomask Japan, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology, [and] SPIE--The International Society for Optical Engineering ; cooperating organizations, the Japan Society of Applied Physics ... (et al.) ; co-organized by Yokohama City (Japan) ; published by SPIE--The International Society for Optical Engineering
Date
[2005]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5853
Hiroichi Kawahira, editor ; sponsored by PMJ--Photomask Japan, BACUS, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for the symposium, Japan Society of Applied Physics ... [and others] ; cooperating organization for technical exhibit, SEMI Japan ; supported by Yokohama City
Date
[2001]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4409
Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Date
[1995]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2440