M. Edward Motamedi, Hans Peter Herzig, chairs/editors ; sponsored by SPIE--the International Society for OPtical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; cooperating organization Soild State Technology ; published by SPIE--the International Society for Optical Engineering
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3226
Abe Ghanbari, Anthony J. Toprac, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] the Electrochemical Society
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3213