Yuli Vladimirsky, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH
Date
[1998]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3331
Bhanwar Singh, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH
Date
[1998]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3332
Will Conley, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH
Date
[1998]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3333
David E. Seeger, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3048
David E. Seeger, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International, SEMATECH
Date
[1996]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2723
Susan K. Jones, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3050
Roderick R. Kunz, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH
Date
[1996]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2724
Rʹegine G. Tarascon-Auriol, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3049
Proceedings / SPIE--the International Society for Optical Engineering Electron-beam, X-ray, EUV, and ion-beam submicrometer lithographies for manufacturing VI