Proceedings / SPIE--the International Society for Optical Engineering In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing II
Gudrun Kissinger, Larg H. Weiland, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations EOS--European Optical Society, IEE--the Institution of Electrical Engineers (UK)
Date
[2001]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4406