David E. Seeger, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3048
sponsored by the Physical Metallurgy and Solidification Committees of the Metallurgical Society of AIME, held at the 113th AIME Annual Meeting, Los Angeles, California, February 26-March 1, 1984 ; edited by K. Mukherjee and J. Mazumder