Kenneth W. Tobin, Jr., chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH
Date
[2004]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5378
Iraj Emami, chair/editor ; Christopher P. Ausschnitt, Kenneth W. Tobin, Jr., cochair/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organization, International SEMATECH ; published by SPIE--the International Society for Optical Engineering
Date
[2005]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5755
David C. Wilson ... [and others], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organization, SIAM--Society for Industrial and Applied Mathematics
Date
[2000]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4121