Marek OsiĆski, Soo Jin Chua, Shigefusa F. Chichibu, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering [and] Nanyang Technological University, Singapore ; cosponsored by SPIE Singapore Chapter ... [et al.] ; cooperating organizations, National University of Singapore ... [et al.]
Date
c1999
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3896
Proceedings / SPIE--the International Society for Optical Engineering In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing II