David E. Seeger, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH
Date
[1997]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3048
Robert O. Green, Qingxi Tong, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cosponsored by National Center for Atmospheric Research/Atmospheric Chemistry Division (USA) ... [and others] ; cooperating organizations, State Commission of Science and Technology of China ... [and others]
Date
[1998]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3502
Morley M. Blouke, Nitin Sampat, Ricardo J. Motta, chairs/editors ; sponsored and published by IS&T--the Society for Imaging Science and Technology [and] SPIE--the International Society for Optical Engineering
Date
[2003]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5017
Yuli Vladimirsky, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH
Date
[1998]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3331
Wolfgang Osten, Christophe Gorecki, Erik Novak, chairs/editors ; sponsored by, SPIE Europe ; cooperating organizations, European Optical Society ; published by SPIE--the International Society for Optical Engineering
Date
[2005]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5856
Morley M. Blouke, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering [and] IS&T--the Society for Imaging Science and Technology
Date
[2005]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5677
Elizabeth A. Dobisz, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH
Date
[2000]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3997