Stella W. Pang, Shih-Chia Chang Charis/Editors ; Sponsored by SPIE--The International Society for Optical Engineering, SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology ; Cooperating Organizations Solid State Technology, Sandia National Laboratories ; Published by SPIE--the International Society for Optical Engineering
Date
[1996]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2879
Wayne Bailey ... [and others], chairs/editors ; sponsored by SEMI-Semiconductor Equipment and Materials International ... [and others], published by SPIE--the International Society for Optical Engineering
Date
[1995]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2641
Daniel J.C. Herr, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ; International SEMATECH
Date
[2002]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4689
Carlos H. Mastrangelo, Holger Becker, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [and others]
Date
[2001]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4560
Marylyn H. Bennett, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
Date
[1995]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2439
Holger Becker, Peter Woias, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
Date
[2003]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4982
Richard M. Silver, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ; International SEMATECH
Date
[2004]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5375
Daniel J. Herr, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ; International SEMATECH
Date
[2003]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5038
Theodore H. Fedynyshyn, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH
Date
[2002]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4690
Jean-Michel Karam, John Yasaitis, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
Date
[2000]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4174