Neal T. Sullivan, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ; International SEMATECH
Date
[2000]
Series
Proceedings of SPIE--the International Society for Optical Engineering ; v. 3998
sponsored by the Environmental Protection Agency, the National Center for Atmospheric Research, and Committee D-22 on Methods of Sampling and Analysis of Atmospheres, American Society for Testing and Materials, Boulder, Colo., 14-16 Aug. 1973