The dissertation will cover the discussion of transparent high power AlGaN/GaN high electron mobility transistors (HEMTs) embedded on flexible substrate. High thermal conductivity of the transparent GaN membrane enhances the performance of the HEMTs compared to its rigid counterpart. Meanwhile, introducing fungi degradable flexible cellulose nanofibrils (CNFs) to study the biodegradability of the high performance flexible electronics. And investigate how 2D materials will affect the sub-10 nm fabrication in directed self-assemble process based on block copolymers (BCPs) assembly. With the high quality zero topology chemical pattern, direct self-assemble of BCPs is achieved with much shorter time, higher density multiplication, and better commensurability.