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Optical micro- and nanometrology in manufacturing technology : 29-30 April, 2004, Strasbourg, France
- Available as
- Physical
Details
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- Creator
- Christophe Gorecki, Anand K. Asundi, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
- Format
- Books
- Language
- English
- Publication
-
- Bellingham, Wash., USA : SPIE, ©2004
- Physical Details
-
- vii, 300 pages : illustrations ; 28 cm
- ISBNs
- 0819453803, 9780819453808
- OCLC
- ocm56769585
- Notes bibliogr. Index.