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19th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 13-15 January, 2003, Sonthofen, Germany
- Author / Creator
- Conferences
- European Conference on Mask Technology for Integrated Circuits and Microcomponents (19th : 2003 : Sonthofen, Germany)
- Available as
- Physical
Details
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- Creator
- Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--Society Microelectronics, Micro- and Precision Engineering (GMM) ... [and others] ; cooperating oganizations, SEMI Europe ... [and others] ; published by SPIE--The International Society for Optical Engineering
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Bellingham, Wash. : SPIE, [2003]
- ©2003
- Physical Details
-
- li, 264 pages : illustrations ; 28 cm
- ISBNs
- 9780819450180, 0819450189
- OCLC
- ocm52443809
- Includes bibliographical references and author index.