Website Search
Find information on spaces, staff, and services.
Catalog Search
Books
Micromachining technology for micro-optics and nano-optics : 28-29 January 2003, San Jose, California, USA
- Available as
- Physical
Details
Checking for availability...
- Creator
- Eric G. Johnson, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
- Included Title
-
- Micromachining technology for micro-optics
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Bellingham, Wash., USA : SPIE, [2003]
- ©2003
- Physical Details
-
- xlii, 262 pages : illustrations ; 28 cm
- ISBNs
- 9780819447845, 0819447846
- OCLC
- ocm51897916
- Earlier conference has title: Micromachining technology for micro-optics.
- Includes bibliographical references and index.