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Lithographic and micromachining techniques for optical component fabrication : 29-30 July 2001, San Diego, [California] USA
- Available as
- Physical
Details
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- Creator
- Ernst-Bernhard Kley, Hans Peter Herzig, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Bellingham, Wash., USA : SPIE, [2001]
- ©2001
- Physical Details
-
- x, 324 pages : illustrations ; 28 cm
- ISBNs
- 9780819441546, 0819441546
- OCLC
- ocm48546510
- Includes bibliographical references and index.