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Process and equipment control in microelectronic manufacturing II : 30-31 May, 2001, Edinburgh, UK
- Available as
- Physical
Details
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- Creator
- Martin Fallon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations EOS--European Optical Society, IEE--the Institution of Electrical Engineers (UK)
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Bellingham, Washington : SPIE, [2001]
- ©2001
- Physical Details
-
- v, 158 pages : illustrations ; 28 cm
- ISBNs
- 9780819441065, 0819441066
- OCLC
- ocm47856798
- Includes bibliographic references and author index.