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Laser applications in microelectronic and optoelectronic manufacturing VI : 22-24 January, 2001, San Jose, USA
- Available as
- Physical
Details
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- Creator
- Malcolm C. Gower, ... [and others], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering
- Format
- Books
- Language
- English
- Publication
-
- Bellingham, Wash., USA : SPIE, [2001]
- ©2001
- Physical Details
-
- x, 506 pages : illustrations ; 28 cm
- ISBNs
- 9780819439529, 0819439525
- OCLC
- ocm47817437
- Includes bibliographical references and index.