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Books
Fundamental aspects of silicon oxidation
- Available as
- Physical
Details
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- Creator
- Yves J. Chabal (ed.)
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Berlin ; New York : Springer, [2001]
- ©2001
- Physical Details
-
- xiii, 260 pages : illustrations (some color) ; 24 cm
- ISBNs
- 9783540416821, 354041682X
- OCLC
- ocm45873712
- Includes bibliographical references and index.