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MEMS reliability for critical applications : 20 September 2000, Santa Clara, USA
- Available as
- Physical
Details
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- Creator
- Russell A. Lawton, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SolidState Technology, [and] Sandia National Laboratories (USA)
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Bellingham, Wash., USA : SPIE, [2000]
- ©2000
- Physical Details
-
- v, 146 pages : illustrations ; 28 cm
- ISBNs
- 9780819438362, 0819438367
- OCLC
- ocm45410860
- Includes bibliographical references and index.