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Electronics and structures for MEMS : 27-29 October 1999, Royal Pines Resort, Queensland, Australia
- Available as
- Physical
Details
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- Creator
- Neil W. Bergmann, Olaf Reinhold, Norman C. Tien, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) ... [and others]
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Bellingham, Wash., USA : SPIE, [1999]
- ©1999
- Physical Details
-
- viii, 428 pages : illustrations ; 28 cm
- ISBNs
- 9780819434920, 0819434922
- OCLC
- ocm43167234
- Includes bibliographical references and index.