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1999 IEEE International Symposium on Semiconductor Manufacturing conference proceedings : October 11-13, 1999, Santa Clara, California
- Author / Creator
- Conferences
- International Symposium on Semiconductor Manufacturing (1999 : Santa Clara, Calif.)
- Available as
- Online
- Physical
Details
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- Other Title
-
- ISSM '99
- Included Title
-
- IEEE Xplore conferences
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Piscataway, N.J. : Institute of Electrical and Electronics Engineers, [1999]
- ©1999
- Physical Details
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- xi, 469 pages : illustrations ; 28 cm
- ISBNs
- 9780780354036, 0780354036, 9780780354043, 0780354044, 9780780354050, 0780354052
- OCLC
- ocm42899491
- "IEEE catalog number 99CH36314"--T.p. verso.
- Includes bibliographical references and author index.
- Also available in electronic format on the World Wide Web.