Website Search
Find information on spaces, staff, and services.
Catalog Search
Books
15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany
- Author / Creator
- Conferences
- European Conference on Mask Technology for Integrated Circuits and Microcomponents (15th : 1998 : Munich-Unterhaching, Germany)
- Available as
- Physical
Details
Checking for availability...
- Creator
- Uwe Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany) ; cooperating organizations, SEMI-Europe--Semiconductor Equipment and Materials International, BACUS (USA), [and] SPIE--the International Society for Optical Engineering
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Bellingham, Wash., USA : SPIE, [1999]
- ©1999
- Physical Details
-
- ix, 180 pages : illustrations ; 28 cm
- ISBNs
- 9780819431394, 0819431397
- OCLC
- ocm41488035
- Includes bibliographical references and index.