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Optical characterization techniques for high-performance microelectronic device manufacturing III : 16-17 October 1996, Austin, Texas
- Available as
- Online
- Physical
Details
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- Creator
- Damon DeBusk, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [and others]
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Bellingham, Wash., USA : SPIE, [1996]
- ©1996
- Physical Details
-
- ix, 218 pages : illustrations ; 28 cm
- ISBNs
- 9780819422750, 0819422754
- OCLC
- ocm35664504
- Includes bibliographical references and author index.