Website Search
Find information on spaces, staff, and services.
Catalog Search
Books
Lasers in microelectronic manufacturing : 10-11 September 1991, San Jose, California
- Available as
- Physical
Details
Checking for availability...
- Creator
- Bodil Braren, chair/editor ; sponsored by SPIE--The International Society for Optical Engineering
- Format
- Books
- Language
- English
- Publication
-
- Bellingham, Wash., USA : SPIE, 1991
- Physical Details
-
- vii, 240 pages : illustrations ; 28 cm
- ISBNs
- 9780819407290, 0819407291
- OCLC
- ocm25381852
- Includes bibliographical references and index.