Website Search
Find information on spaces, staff, and services.
Catalog Search
Books
Advances in resist technology and processing VIII : 4-5 March, 1991, San Jose, California
- Available as
- Online
- Physical
Details
Checking for availability...
- Creator
- Hiroshi Ito, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
- Format
- Books
- Language
- English
- Publication
-
- Bellingham, Wash., USA : SPIE, [1991]
- ©1991
- Physical Details
-
- xii, 679 pages : illustrations ; 28 cm
- ISBNs
- 0819405655, 9780819405654
- OCLC
- ocm24150723
- Includes bibliographical references and index.