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Rapid thermal and related processing techniques : 2-3 October 1990, Santa Clara, California
- Available as
- Physical
Details
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- Creator
- Rajendra Singh, Mehrdad M. Moslehi, chairs / editors ; sponsored and published by SPIE--the International Society for Optical Engineering
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Bellingham, Wash., USA : SPIE, [1991]
- ©1991
- Physical Details
-
- ix, 422 pages : illustrations ; 28 cm
- ISBNs
- 9780819404626, 0819404624
- OCLC
- ocm23606222
- Includes bibliographical references and index.