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10th annual Symposium on Microlithography : September 26-27, 1990, Sunnyvale Hilton, Sunnyvale, California
- Author / Creator
- Conferences
- Symposium on Microlithography (10th : 1990 : Sunnyvale, Calif.)
- Available as
- Physical
Details
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- Creator
- sponsored by Bacus International
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1991]
- ©1991
- Physical Details
-
- v, 315 pages : illustrations ; 23 cm
- ISBNs
- 9780819406057, 0819406058
- OCLC
- ocm23526852
- Includes bibliographical references and index.