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Microcircuit engineering 89 : proceedings of the International Conference on Microlithography, September 26-28, 1989 Cambridge, England
- Author / Creator
- Conferences
- Microcircuit Engineering 89 (1989 : Cambridge, England)
- Available as
- Physical
Details
Checking for availability...
- Creator
- edited by H. Ahmed ... [and others]
- Other Title
-
- ME'89
- Format
- Books
- Language
- English
- Contributors
- Publication
-
- Amsterdam ; New York : North-Holland, 1990
- Physical Details
-
- 708 pages : illustrations ; 27 cm
- ISBNs
- 9780444881823, 0444881824
- OCLC
- ocm23080133, ocm22213493
- Volume contains contributed papers presented at Microcircuit Engineering 89.
- Includes bibliographical references and index.